5/18/2011	12:07:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2011	12:07:53 AM	Recipe started at 12:07 AM
5/18/2011	12:07:53 AM	H2 valve closed
5/18/2011	12:07:53 AM	BCl3 valve closed
5/18/2011	12:07:53 AM	PH3 valve closed
5/18/2011	12:07:53 AM	SiCl4 pre valve closed
5/18/2011	12:07:53 AM	SiCl4 post valve closed
5/18/2011	12:07:53 AM	Main Vac valve closed
5/18/2011	12:07:53 AM	Bypass valve closed
5/18/2011	12:07:53 AM	Bubbler valve closed
5/18/2011	12:07:53 AM	Helium valve opened
5/18/2011	12:07:53 AM	Helium MFC set to  500.000000
5/18/2011	12:07:53 AM	H2 MFC set to  0.000000
5/18/2011	12:07:53 AM	BCl3 MFC set to  0.000000
5/18/2011	12:07:53 AM	PHl3 MFC set to  0.000000
5/18/2011	12:07:53 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:07:53 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:07:53 AM	Tube furnace set to 0
5/18/2011	12:09:13 AM	Helium valve closed
5/18/2011	12:09:13 AM	H2 valve closed
5/18/2011	12:09:13 AM	BCl3 valve closed
5/18/2011	12:09:13 AM	PH3 valve closed
5/18/2011	12:09:13 AM	SiCl4 pre valve closed
5/18/2011	12:09:13 AM	SiCl4 post valve closed
5/18/2011	12:09:13 AM	Main Vac valve closed
5/18/2011	12:09:13 AM	Bypass valve closed
5/18/2011	12:09:13 AM	Bubbler valve closed
5/18/2011	12:09:13 AM	Helium MFC set to  0.000000
5/18/2011	12:09:13 AM	H2 MFC set to  0.000000
5/18/2011	12:09:13 AM	BCl3 MFC set to  0.000000
5/18/2011	12:09:13 AM	PHl3 MFC set to  0.000000
5/18/2011	12:09:13 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:09:13 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:09:13 AM	Tube furnace set to 0
5/18/2011	12:09:13 AM	Run finished at 12:09 AM
5/18/2011	12:09:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2011	12:25:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	12:25:36 AM	Recipe started at 12:25 AM
5/18/2011	12:25:36 AM	Helium valve closed
5/18/2011	12:25:36 AM	H2 valve closed
5/18/2011	12:25:36 AM	BCl3 valve closed
5/18/2011	12:25:36 AM	PH3 valve closed
5/18/2011	12:25:36 AM	SiCl4 pre valve closed
5/18/2011	12:25:36 AM	SiCl4 post valve closed
5/18/2011	12:25:36 AM	Main Vac valve closed
5/18/2011	12:25:36 AM	Bubbler valve closed
5/18/2011	12:25:36 AM	Bypass valve opened
5/18/2011	12:25:36 AM	Helium MFC set to  0.000000
5/18/2011	12:25:36 AM	H2 MFC set to  0.000000
5/18/2011	12:25:36 AM	BCl3 MFC set to  0.000000
5/18/2011	12:25:36 AM	PHl3 MFC set to  0.000000
5/18/2011	12:25:36 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:25:36 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:25:36 AM	Tube furnace set to 0
5/18/2011	12:26:09 AM	Helium valve closed
5/18/2011	12:26:09 AM	H2 valve closed
5/18/2011	12:26:09 AM	BCl3 valve closed
5/18/2011	12:26:09 AM	PH3 valve closed
5/18/2011	12:26:09 AM	SiCl4 pre valve closed
5/18/2011	12:26:09 AM	SiCl4 post valve closed
5/18/2011	12:26:09 AM	Bubbler valve closed
5/18/2011	12:26:09 AM	Main Vac valve opened
5/18/2011	12:26:09 AM	Bypass valve opened
5/18/2011	12:26:09 AM	Helium MFC set to  0.000000
5/18/2011	12:26:09 AM	H2 MFC set to  0.000000
5/18/2011	12:26:09 AM	BCl3 MFC set to  0.000000
5/18/2011	12:26:09 AM	PHl3 MFC set to  0.000000
5/18/2011	12:26:09 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:26:09 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:26:09 AM	Tube furnace set to 0
5/18/2011	12:26:09 AM	Run finished at 12:26 AM
5/18/2011	12:26:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	12:27:43 AM	Recipe started at 12:27 AM
5/18/2011	12:27:43 AM	BCl3 valve closed
5/18/2011	12:27:43 AM	PH3 valve closed
5/18/2011	12:27:43 AM	SiCl4 pre valve closed
5/18/2011	12:27:43 AM	SiCl4 post valve closed
5/18/2011	12:27:43 AM	Main Vac valve closed
5/18/2011	12:27:43 AM	Bypass valve closed
5/18/2011	12:27:43 AM	Bubbler valve closed
5/18/2011	12:27:43 AM	Helium valve opened
5/18/2011	12:27:43 AM	H2 valve opened
5/18/2011	12:27:43 AM	Helium MFC set to  190.000000
5/18/2011	12:27:43 AM	H2 MFC set to  10.000000
5/18/2011	12:27:43 AM	BCl3 MFC set to  0.000000
5/18/2011	12:27:43 AM	PHl3 MFC set to  0.000000
5/18/2011	12:27:43 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:27:43 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:27:44 AM	Tube furnace set to 0
5/18/2011	12:31:07 AM	BCl3 valve closed
5/18/2011	12:31:07 AM	PH3 valve closed
5/18/2011	12:31:07 AM	SiCl4 pre valve closed
5/18/2011	12:31:07 AM	SiCl4 post valve closed
5/18/2011	12:31:07 AM	Main Vac valve closed
5/18/2011	12:31:07 AM	Bypass valve closed
5/18/2011	12:31:07 AM	Helium valve opened
5/18/2011	12:31:07 AM	H2 valve opened
5/18/2011	12:31:07 AM	Bubbler valve opened
5/18/2011	12:31:07 AM	Helium MFC set to  47.500000
5/18/2011	12:31:07 AM	H2 MFC set to  2.500000
5/18/2011	12:31:07 AM	BCl3 MFC set to  0.000000
5/18/2011	12:31:07 AM	PHl3 MFC set to  0.000000
5/18/2011	12:31:07 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:31:07 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:31:08 AM	Tube furnace set to 350
5/18/2011	12:31:08 AM	Helium valve closed
5/18/2011	12:31:08 AM	H2 valve closed
5/18/2011	12:31:08 AM	BCl3 valve closed
5/18/2011	12:31:08 AM	PH3 valve closed
5/18/2011	12:31:08 AM	SiCl4 pre valve closed
5/18/2011	12:31:08 AM	SiCl4 post valve closed
5/18/2011	12:31:08 AM	Main Vac valve closed
5/18/2011	12:31:08 AM	Bubbler valve closed
5/18/2011	12:31:08 AM	Bypass valve closed
5/18/2011	12:31:08 AM	Helium MFC set to  0.000000
5/18/2011	12:31:08 AM	H2 MFC set to  0.000000
5/18/2011	12:31:08 AM	BCl3 MFC set to  0.000000
5/18/2011	12:31:08 AM	PHl3 MFC set to  0.000000
5/18/2011	12:31:08 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:31:08 AM	Bypass solenoid MFC set to  760.000000
5/18/2011	12:31:08 AM	Tube furnace set to 0
5/18/2011	12:31:08 AM	Baratron reads 747.443289 Torr and NaOH valve is open.  Emergency exit.
5/18/2011	12:31:20 AM	Run aborted at 12:31 AM
5/18/2011	12:31:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	12:31:32 AM	Recipe started at 12:31 AM
5/18/2011	12:31:32 AM	Helium valve closed
5/18/2011	12:31:32 AM	H2 valve closed
5/18/2011	12:31:32 AM	BCl3 valve closed
5/18/2011	12:31:32 AM	PH3 valve closed
5/18/2011	12:31:32 AM	SiCl4 pre valve closed
5/18/2011	12:31:32 AM	SiCl4 post valve closed
5/18/2011	12:31:32 AM	Main Vac valve closed
5/18/2011	12:31:32 AM	Bubbler valve closed
5/18/2011	12:31:32 AM	Bypass valve opened
5/18/2011	12:31:32 AM	Helium MFC set to  0.000000
5/18/2011	12:31:32 AM	H2 MFC set to  0.000000
5/18/2011	12:31:32 AM	BCl3 MFC set to  0.000000
5/18/2011	12:31:32 AM	PHl3 MFC set to  0.000000
5/18/2011	12:31:32 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:31:32 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:31:32 AM	Tube furnace set to 0
5/18/2011	12:31:55 AM	Helium valve closed
5/18/2011	12:31:55 AM	H2 valve closed
5/18/2011	12:31:55 AM	BCl3 valve closed
5/18/2011	12:31:55 AM	PH3 valve closed
5/18/2011	12:31:55 AM	SiCl4 pre valve closed
5/18/2011	12:31:55 AM	SiCl4 post valve closed
5/18/2011	12:31:55 AM	Bubbler valve closed
5/18/2011	12:31:55 AM	Main Vac valve opened
5/18/2011	12:31:55 AM	Bypass valve opened
5/18/2011	12:31:55 AM	Helium MFC set to  0.000000
5/18/2011	12:31:55 AM	H2 MFC set to  0.000000
5/18/2011	12:31:55 AM	BCl3 MFC set to  0.000000
5/18/2011	12:31:55 AM	PHl3 MFC set to  0.000000
5/18/2011	12:31:55 AM	SiCl4 MFC set to  0.000000
5/18/2011	12:31:55 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	12:31:55 AM	Tube furnace set to 0
5/18/2011	12:31:55 AM	Run finished at 12:31 AM
5/18/2011	12:31:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	10:05:35 AM	Recipe started at 10:05 AM
5/18/2011	10:05:35 AM	BCl3 valve closed
5/18/2011	10:05:35 AM	PH3 valve closed
5/18/2011	10:05:35 AM	SiCl4 pre valve closed
5/18/2011	10:05:35 AM	SiCl4 post valve closed
5/18/2011	10:05:35 AM	Main Vac valve closed
5/18/2011	10:05:35 AM	Bypass valve closed
5/18/2011	10:05:35 AM	Bubbler valve closed
5/18/2011	10:05:35 AM	Helium valve opened
5/18/2011	10:05:35 AM	H2 valve opened
5/18/2011	10:05:35 AM	Helium MFC set to  190.000000
5/18/2011	10:05:35 AM	H2 MFC set to  10.000000
5/18/2011	10:05:35 AM	BCl3 MFC set to  0.000000
5/18/2011	10:05:35 AM	PHl3 MFC set to  0.000000
5/18/2011	10:05:35 AM	SiCl4 MFC set to  0.000000
5/18/2011	10:05:35 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	10:05:36 AM	Tube furnace set to 0
5/18/2011	10:08:59 AM	BCl3 valve closed
5/18/2011	10:08:59 AM	PH3 valve closed
5/18/2011	10:08:59 AM	SiCl4 pre valve closed
5/18/2011	10:08:59 AM	SiCl4 post valve closed
5/18/2011	10:08:59 AM	Main Vac valve closed
5/18/2011	10:08:59 AM	Bypass valve closed
5/18/2011	10:08:59 AM	Helium valve opened
5/18/2011	10:08:59 AM	H2 valve opened
5/18/2011	10:08:59 AM	Bubbler valve opened
5/18/2011	10:08:59 AM	Helium MFC set to  47.500000
5/18/2011	10:08:59 AM	H2 MFC set to  2.500000
5/18/2011	10:08:59 AM	BCl3 MFC set to  0.000000
5/18/2011	10:08:59 AM	PHl3 MFC set to  0.000000
5/18/2011	10:08:59 AM	SiCl4 MFC set to  0.000000
5/18/2011	10:08:59 AM	Bypass solenoid MFC set to  0.000000
5/18/2011	10:08:59 AM	Tube furnace set to 350
5/18/2011	9:30:29 PM	Run aborted at 9:30 PM
5/18/2011	9:30:29 PM	Helium valve closed
5/18/2011	9:30:29 PM	H2 valve closed
5/18/2011	9:30:29 PM	BCl3 valve closed
5/18/2011	9:30:29 PM	PH3 valve closed
5/18/2011	9:30:29 PM	SiCl4 pre valve closed
5/18/2011	9:30:29 PM	SiCl4 post valve closed
5/18/2011	9:30:29 PM	Bypass valve closed
5/18/2011	9:30:29 PM	Main Vac valve closed
5/18/2011	9:30:29 PM	Bubbler valve closed
5/18/2011	9:30:29 PM	Helium MFC set to  0.000000
5/18/2011	9:30:29 PM	H2 MFC set to  0.000000
5/18/2011	9:30:29 PM	BCl3 MFC set to  0.000000
5/18/2011	9:30:29 PM	PHl3 MFC set to  0.000000
5/18/2011	9:30:29 PM	SiCl4 MFC set to  0.000000
5/18/2011	9:30:30 PM	Tube furnace set to 0
5/18/2011	10:17:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2011	10:17:17 PM	Recipe started at 10:17 PM
5/18/2011	10:17:17 PM	H2 valve closed
5/18/2011	10:17:17 PM	BCl3 valve closed
5/18/2011	10:17:17 PM	PH3 valve closed
5/18/2011	10:17:17 PM	SiCl4 pre valve closed
5/18/2011	10:17:17 PM	SiCl4 post valve closed
5/18/2011	10:17:17 PM	Main Vac valve closed
5/18/2011	10:17:17 PM	Bypass valve closed
5/18/2011	10:17:17 PM	Bubbler valve closed
5/18/2011	10:17:17 PM	Helium valve opened
5/18/2011	10:17:17 PM	Helium MFC set to  500.000000
5/18/2011	10:17:17 PM	H2 MFC set to  0.000000
5/18/2011	10:17:17 PM	BCl3 MFC set to  0.000000
5/18/2011	10:17:17 PM	PHl3 MFC set to  0.000000
5/18/2011	10:17:17 PM	SiCl4 MFC set to  0.000000
5/18/2011	10:17:17 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	10:17:17 PM	Tube furnace set to 0
5/18/2011	10:17:20 PM	Helium valve closed
5/18/2011	10:17:20 PM	H2 valve closed
5/18/2011	10:17:20 PM	BCl3 valve closed
5/18/2011	10:17:20 PM	PH3 valve closed
5/18/2011	10:17:20 PM	SiCl4 pre valve closed
5/18/2011	10:17:20 PM	SiCl4 post valve closed
5/18/2011	10:17:20 PM	Main Vac valve closed
5/18/2011	10:17:20 PM	Bypass valve closed
5/18/2011	10:17:20 PM	Bubbler valve closed
5/18/2011	10:17:20 PM	Helium MFC set to  0.000000
5/18/2011	10:17:20 PM	H2 MFC set to  0.000000
5/18/2011	10:17:20 PM	BCl3 MFC set to  0.000000
5/18/2011	10:17:20 PM	PHl3 MFC set to  0.000000
5/18/2011	10:17:20 PM	SiCl4 MFC set to  0.000000
5/18/2011	10:17:20 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	10:17:21 PM	Tube furnace set to 0
5/18/2011	10:17:21 PM	Run finished at 10:17 PM
5/18/2011	10:17:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2011	11:49:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	11:49:51 PM	Recipe started at 11:49 PM
5/18/2011	11:49:51 PM	Helium valve closed
5/18/2011	11:49:51 PM	H2 valve closed
5/18/2011	11:49:51 PM	BCl3 valve closed
5/18/2011	11:49:51 PM	PH3 valve closed
5/18/2011	11:49:51 PM	SiCl4 pre valve closed
5/18/2011	11:49:51 PM	SiCl4 post valve closed
5/18/2011	11:49:51 PM	Main Vac valve closed
5/18/2011	11:49:51 PM	Bubbler valve closed
5/18/2011	11:49:51 PM	Bypass valve opened
5/18/2011	11:49:51 PM	Helium MFC set to  0.000000
5/18/2011	11:49:51 PM	H2 MFC set to  0.000000
5/18/2011	11:49:51 PM	BCl3 MFC set to  0.000000
5/18/2011	11:49:51 PM	PHl3 MFC set to  0.000000
5/18/2011	11:49:51 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:49:51 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:49:51 PM	Tube furnace set to 0
5/18/2011	11:50:26 PM	Helium valve closed
5/18/2011	11:50:26 PM	H2 valve closed
5/18/2011	11:50:26 PM	BCl3 valve closed
5/18/2011	11:50:26 PM	PH3 valve closed
5/18/2011	11:50:26 PM	SiCl4 pre valve closed
5/18/2011	11:50:26 PM	SiCl4 post valve closed
5/18/2011	11:50:26 PM	Bubbler valve closed
5/18/2011	11:50:26 PM	Main Vac valve opened
5/18/2011	11:50:26 PM	Bypass valve opened
5/18/2011	11:50:26 PM	Helium MFC set to  0.000000
5/18/2011	11:50:26 PM	H2 MFC set to  0.000000
5/18/2011	11:50:26 PM	BCl3 MFC set to  0.000000
5/18/2011	11:50:26 PM	PHl3 MFC set to  0.000000
5/18/2011	11:50:26 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:50:26 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:50:26 PM	Tube furnace set to 0
5/18/2011	11:50:26 PM	Run finished at 11:50 PM
5/18/2011	11:50:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	11:52:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/18/2011	11:52:38 PM	Recipe started at 11:52 PM
5/18/2011	11:52:38 PM	Helium valve closed
5/18/2011	11:52:38 PM	H2 valve closed
5/18/2011	11:52:38 PM	BCl3 valve closed
5/18/2011	11:52:38 PM	PH3 valve closed
5/18/2011	11:52:38 PM	SiCl4 pre valve closed
5/18/2011	11:52:38 PM	SiCl4 post valve closed
5/18/2011	11:52:38 PM	Main Vac valve closed
5/18/2011	11:52:38 PM	Bubbler valve closed
5/18/2011	11:52:38 PM	Bypass valve opened
5/18/2011	11:52:38 PM	Helium MFC set to  0.000000
5/18/2011	11:52:38 PM	H2 MFC set to  0.000000
5/18/2011	11:52:38 PM	BCl3 MFC set to  0.000000
5/18/2011	11:52:38 PM	PHl3 MFC set to  0.000000
5/18/2011	11:52:38 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:52:38 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:52:38 PM	Tube furnace set to 0
5/18/2011	11:52:38 PM	Helium valve closed
5/18/2011	11:52:38 PM	H2 valve closed
5/18/2011	11:52:38 PM	BCl3 valve closed
5/18/2011	11:52:38 PM	PH3 valve closed
5/18/2011	11:52:38 PM	SiCl4 pre valve closed
5/18/2011	11:52:38 PM	SiCl4 post valve closed
5/18/2011	11:52:38 PM	Bubbler valve closed
5/18/2011	11:52:38 PM	Main Vac valve opened
5/18/2011	11:52:38 PM	Bypass valve opened
5/18/2011	11:52:38 PM	Helium MFC set to  0.000000
5/18/2011	11:52:38 PM	H2 MFC set to  0.000000
5/18/2011	11:52:38 PM	BCl3 MFC set to  0.000000
5/18/2011	11:52:38 PM	PHl3 MFC set to  0.000000
5/18/2011	11:52:38 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:52:38 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:52:38 PM	Tube furnace set to 0
5/18/2011	11:53:38 PM	H2 valve closed
5/18/2011	11:53:38 PM	BCl3 valve closed
5/18/2011	11:53:38 PM	PH3 valve closed
5/18/2011	11:53:38 PM	SiCl4 pre valve closed
5/18/2011	11:53:38 PM	SiCl4 post valve closed
5/18/2011	11:53:38 PM	Bubbler valve closed
5/18/2011	11:53:38 PM	Helium valve opened
5/18/2011	11:53:38 PM	Main Vac valve opened
5/18/2011	11:53:38 PM	Bypass valve opened
5/18/2011	11:53:39 PM	Helium MFC set to  100.000000
5/18/2011	11:53:39 PM	H2 MFC set to  0.000000
5/18/2011	11:53:39 PM	BCl3 MFC set to  0.000000
5/18/2011	11:53:39 PM	PHl3 MFC set to  0.000000
5/18/2011	11:53:39 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:53:39 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:53:39 PM	Tube furnace set to 0
5/18/2011	11:54:39 PM	Helium valve closed
5/18/2011	11:54:39 PM	H2 valve closed
5/18/2011	11:54:39 PM	BCl3 valve closed
5/18/2011	11:54:39 PM	PH3 valve closed
5/18/2011	11:54:39 PM	SiCl4 pre valve closed
5/18/2011	11:54:39 PM	SiCl4 post valve closed
5/18/2011	11:54:39 PM	Bubbler valve closed
5/18/2011	11:54:39 PM	Main Vac valve opened
5/18/2011	11:54:39 PM	Bypass valve opened
5/18/2011	11:54:39 PM	Helium MFC set to  0.000000
5/18/2011	11:54:39 PM	H2 MFC set to  0.000000
5/18/2011	11:54:39 PM	BCl3 MFC set to  0.000000
5/18/2011	11:54:39 PM	PHl3 MFC set to  0.000000
5/18/2011	11:54:39 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:54:39 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:54:39 PM	Tube furnace set to 0
5/18/2011	11:55:39 PM	H2 valve closed
5/18/2011	11:55:39 PM	BCl3 valve closed
5/18/2011	11:55:39 PM	PH3 valve closed
5/18/2011	11:55:39 PM	SiCl4 pre valve closed
5/18/2011	11:55:39 PM	SiCl4 post valve closed
5/18/2011	11:55:39 PM	Bubbler valve closed
5/18/2011	11:55:39 PM	Helium valve opened
5/18/2011	11:55:39 PM	Main Vac valve opened
5/18/2011	11:55:39 PM	Bypass valve opened
5/18/2011	11:55:39 PM	Helium MFC set to  100.000000
5/18/2011	11:55:39 PM	H2 MFC set to  0.000000
5/18/2011	11:55:39 PM	BCl3 MFC set to  0.000000
5/18/2011	11:55:39 PM	PHl3 MFC set to  0.000000
5/18/2011	11:55:39 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:55:39 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:55:39 PM	Tube furnace set to 0
5/18/2011	11:55:53 PM	Run aborted at 11:55 PM
5/18/2011	11:55:53 PM	Helium valve closed
5/18/2011	11:55:53 PM	H2 valve closed
5/18/2011	11:55:53 PM	BCl3 valve closed
5/18/2011	11:55:53 PM	PH3 valve closed
5/18/2011	11:55:53 PM	SiCl4 pre valve closed
5/18/2011	11:55:53 PM	SiCl4 post valve closed
5/18/2011	11:55:53 PM	Bypass valve closed
5/18/2011	11:55:53 PM	Main Vac valve closed
5/18/2011	11:55:53 PM	Bubbler valve closed
5/18/2011	11:55:53 PM	Helium MFC set to  0.000000
5/18/2011	11:55:53 PM	H2 MFC set to  0.000000
5/18/2011	11:55:53 PM	BCl3 MFC set to  0.000000
5/18/2011	11:55:53 PM	PHl3 MFC set to  0.000000
5/18/2011	11:55:53 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:55:53 PM	Tube furnace set to 0
5/18/2011	11:55:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/18/2011	11:55:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	11:55:56 PM	Recipe started at 11:55 PM
5/18/2011	11:55:56 PM	Helium valve closed
5/18/2011	11:55:56 PM	H2 valve closed
5/18/2011	11:55:56 PM	BCl3 valve closed
5/18/2011	11:55:56 PM	PH3 valve closed
5/18/2011	11:55:56 PM	SiCl4 pre valve closed
5/18/2011	11:55:56 PM	SiCl4 post valve closed
5/18/2011	11:55:56 PM	Main Vac valve closed
5/18/2011	11:55:56 PM	Bubbler valve closed
5/18/2011	11:55:56 PM	Bypass valve opened
5/18/2011	11:55:56 PM	Helium MFC set to  0.000000
5/18/2011	11:55:56 PM	H2 MFC set to  0.000000
5/18/2011	11:55:56 PM	BCl3 MFC set to  0.000000
5/18/2011	11:55:56 PM	PHl3 MFC set to  0.000000
5/18/2011	11:55:56 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:55:56 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:55:56 PM	Tube furnace set to 0
5/18/2011	11:55:56 PM	Helium valve closed
5/18/2011	11:55:56 PM	H2 valve closed
5/18/2011	11:55:56 PM	BCl3 valve closed
5/18/2011	11:55:56 PM	PH3 valve closed
5/18/2011	11:55:56 PM	SiCl4 pre valve closed
5/18/2011	11:55:56 PM	SiCl4 post valve closed
5/18/2011	11:55:56 PM	Bubbler valve closed
5/18/2011	11:55:56 PM	Main Vac valve opened
5/18/2011	11:55:56 PM	Bypass valve opened
5/18/2011	11:55:56 PM	Helium MFC set to  0.000000
5/18/2011	11:55:56 PM	H2 MFC set to  0.000000
5/18/2011	11:55:56 PM	BCl3 MFC set to  0.000000
5/18/2011	11:55:56 PM	PHl3 MFC set to  0.000000
5/18/2011	11:55:56 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:55:56 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:55:56 PM	Tube furnace set to 0
5/18/2011	11:55:57 PM	Run finished at 11:55 PM
5/18/2011	11:55:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	11:56:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2011	11:56:08 PM	Recipe started at 11:56 PM
5/18/2011	11:56:08 PM	Helium valve closed
5/18/2011	11:56:08 PM	H2 valve closed
5/18/2011	11:56:08 PM	BCl3 valve closed
5/18/2011	11:56:08 PM	PH3 valve closed
5/18/2011	11:56:08 PM	SiCl4 pre valve closed
5/18/2011	11:56:08 PM	SiCl4 post valve closed
5/18/2011	11:56:08 PM	Main Vac valve closed
5/18/2011	11:56:08 PM	Bubbler valve closed
5/18/2011	11:56:08 PM	Bypass valve opened
5/18/2011	11:56:08 PM	Helium MFC set to  0.000000
5/18/2011	11:56:08 PM	H2 MFC set to  0.000000
5/18/2011	11:56:08 PM	BCl3 MFC set to  0.000000
5/18/2011	11:56:08 PM	PHl3 MFC set to  0.000000
5/18/2011	11:56:08 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:56:08 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:56:09 PM	Tube furnace set to 0
5/18/2011	11:56:09 PM	Helium valve closed
5/18/2011	11:56:09 PM	H2 valve closed
5/18/2011	11:56:09 PM	BCl3 valve closed
5/18/2011	11:56:09 PM	PH3 valve closed
5/18/2011	11:56:09 PM	SiCl4 pre valve closed
5/18/2011	11:56:09 PM	SiCl4 post valve closed
5/18/2011	11:56:09 PM	Bubbler valve closed
5/18/2011	11:56:09 PM	Main Vac valve opened
5/18/2011	11:56:09 PM	Bypass valve opened
5/18/2011	11:56:09 PM	Helium MFC set to  0.000000
5/18/2011	11:56:09 PM	H2 MFC set to  0.000000
5/18/2011	11:56:09 PM	BCl3 MFC set to  0.000000
5/18/2011	11:56:09 PM	PHl3 MFC set to  0.000000
5/18/2011	11:56:09 PM	SiCl4 MFC set to  0.000000
5/18/2011	11:56:09 PM	Bypass solenoid MFC set to  0.000000
5/18/2011	11:56:09 PM	Tube furnace set to 0
5/18/2011	11:56:09 PM	Run finished at 11:56 PM
5/18/2011	11:56:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
